GALILEO C100 A100
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Machine code: ME51
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Year: 1992
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Working width (mm): 1000
LEYBOLD Topmet 3280
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Machine code: ME85
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Year: 2000
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Working width (mm): 3280
GENERAL VACUUM EQUIPMENT HF 1450-112
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Machine code: ME89
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Year: 1994
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Working width (mm): 1450
GALILEO MEGA 2410 A
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Machine code: ME88
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Year: 2001
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Working width (mm): 2450
GENERAL VACUUM EQUIPMENT K5000
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Machine code: ME91
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Year: 2006
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Working width (mm): 2400
LEYBOLD TopMet 2450
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Machine code: ME84
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Year: 2008
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Working width (mm): 2450